Shutdown stsetch SNF 2011-10-24 16:54:38: Wafer broke in etch chamber
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Mon Oct 24 17:38:03 PDT 2011
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Shutdown stsetch SNF 2011-10-24 16:54:38: Wafer broke in etch chamber
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Shutdown stsetch SNF 2011-10-26 13:11:56: wafer broke during etching
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Removed broken wafer and ran O2 clean...
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Shutdown stsetch SNF 2011-10-24 16:54:38: Wafer broke in etch chamber
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Shutdown stsetch SNF 2011-10-26 13:11:56: wafer broke during etching
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