Comment stsetch SNF 2011-10-24 16:53:03: deleted shutdown reports
latta at snf.stanford.edu
latta at snf.stanford.edu
Tue Oct 25 09:49:47 PDT 2011
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Comment stsetch SNF 2011-10-24 16:53:03: deleted shutdown reports
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Shutdown stsetch SNF 2011-10-24 16:54:38: Wafer broke in etch chamber
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informed user of resolved option in coral.
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Comment stsetch SNF 2011-10-24 16:53:03: deleted shutdown reports
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Shutdown stsetch SNF 2011-10-24 16:54:38: Wafer broke in etch chamber
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