Shutdown stsetch SNF 2011-10-28 06:03:14: tie in
mdickey at snf.stanford.edu
mdickey at snf.stanford.edu
Fri Oct 28 06:03:14 PDT 2011
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Shutdown stsetch SNF 2011-10-27 02:24:46: wafer broke during etch in chamber
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Shutdown stsetch SNF 2011-10-28 06:03:14: tie in
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Down for flow meter tie in
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Shutdown stsetch SNF 2011-10-27 02:24:46: wafer broke during etch in chamber
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Shutdown stsetch SNF 2011-10-28 06:03:14: tie in
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