Shutdown stsetch SNF 2011-10-31 23:25:29: Wafer Stuck In Chamber

ehsans at ehsans at
Mon Oct 31 23:25:30 PDT 2011

The prongs did not grab the wafer and holder properly so the arm pulled the wafer out of place. The wafer is now in the chamber, but in the way of the arm, and cannot be retrieved. I have placed a wafer holder and tweezers on the machine. Please put the wafer in there after you retrieve it. It does not look broken when using a flash light. I apologize for the inconvenience.

More information about the stsetch-pcs mailing list