October 2011 Archives by date

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Starting: Mon Oct 3 10:41:55 PDT 2011
Ending: Mon Oct 31 23:25:30 PDT 2011
Messages: 33

• Shutdown stsetch SNF 2011-09-30 19:01:21: wafer broken on chuck   eenriquez at snf.stanford.edu
• Shutdown stsetch SNF 2011-10-03 17:04:14: broken wafer   eszilagy at snf.stanford.edu
• Shutdown stsetch SNF 2011-10-03 17:04:14: broken wafer   cbaxter at snf.stanford.edu
• Comment stsetch SNF 2011-09-15 15:05:01: Sept qual   latta at snf.stanford.edu
• Problem stsetch SNF 2011-10-04 12:34:07: Etch rates decresed during qual   latta at snf.stanford.edu
• Shutdown stsetch SNF 2011-10-06 17:42:21: broken wafer   eszilagy at snf.stanford.edu
• Shutdown stsetch SNF 2011-10-06 17:42:21: broken wafer   cbaxter at snf.stanford.edu
• Shutdown stsetch SNF 2011-10-07 18:21:19: Wafer cracked in chamber   ehsans at snf.stanford.edu
• Problem stsetch SNF 2011-10-07 21:07:18: Frequent wafer breakages (amongst several users)   bchui at snf.stanford.edu
• Shutdown stsetch SNF 2011-10-07 18:21:19: Wafer cracked in chamber   eenriquez at snf.stanford.edu
• Problem stsetch SNF 2011-10-07 21:07:18: Frequent wafer breakages (amongst several users)   eenriquez at snf.stanford.edu
• Comment stsetch SNF 2011-10-11 13:18:20: He flow during RF on = 4.02   latta at snf.stanford.edu
• Problem stsetch SNF 2011-10-04 12:34:07: Etch rates decresed during qual   latta at snf.stanford.edu
• Problem stsetch SNF 2011-10-11 18:31:10: Qual after repair (lifter burr polished off)   latta at snf.stanford.edu
• Comment stsetch SNF 2011-08-10 18:08:44: Completed monthly PM   latta at snf.stanford.edu
• Comment stsetch SNF 2011-08-11 11:24:32: qual run after repair   latta at snf.stanford.edu
• Comment stsetch SNF 2011-08-18 16:04:02: Qual check after report of low ER   latta at snf.stanford.edu
• Comment stsetch SNF 2011-08-30 15:07:13: New 0-ring for the holder needed   latta at snf.stanford.edu
• Comment stsetch SNF 2011-10-14 11:18:15: New ring for holder- Yea!   latta at snf.stanford.edu
• Shutdown stsetch SNF 2011-10-21 20:46:37: TRANSFER ARM BROKE WAFER   ludwig at snf.stanford.edu
• Shutdown stsetch SNF 2011-10-21 20:46:37: TRANSFER ARM BROKE WAFER   cbaxter at snf.stanford.edu
• Comment stsetch SNF 2011-10-24 16:53:03: deleted shutdown reports   npapte at snf.stanford.edu
• Shutdown stsetch SNF 2011-10-24 16:54:38: Wafer broke in etch chamber   bchui at snf.stanford.edu
• Shutdown stsetch SNF 2011-10-24 16:54:38: Wafer broke in etch chamber   cbaxter at snf.stanford.edu
• Comment stsetch SNF 2011-10-24 16:53:03: deleted shutdown reports   latta at snf.stanford.edu
• Shutdown stsetch SNF 2011-10-26 13:11:56: wafer broke during etching   xzhuan1 at snf.stanford.edu
• Shutdown stsetch SNF 2011-10-26 13:11:56: wafer broke during etching   eenriquez at snf.stanford.edu
• Shutdown stsetch SNF 2011-10-27 02:24:46: wafer broke during etch in chamber   scrippen at snf.stanford.edu
• Shutdown stsetch SNF 2011-10-27 02:24:46: wafer broke during etch in chamber   eenriquez at snf.stanford.edu
• Shutdown stsetch SNF 2011-10-28 06:03:14: tie in   mdickey at snf.stanford.edu
• Shutdown stsetch SNF 2011-10-28 06:03:14: tie in   mdickey at snf.stanford.edu
• Comment stsetch SNF 2011-10-31 15:35:42: Process timer not counting down   eenriquez at snf.stanford.edu
• Shutdown stsetch SNF 2011-10-31 23:25:29: Wafer Stuck In Chamber   ehsans at snf.stanford.edu

Last message date: Mon Oct 31 23:25:30 PDT 2011
Archived on: Fri Jan 11 13:11:28 PST 2013

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