From xzhuan1 at snf.stanford.edu Sun Sep 4 14:47:51 2011 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Sun, 4 Sep 2011 14:47:51 -0700 Subject: Problem stsetch SNF 2011-09-04 14:47:51: system communication error Message-ID: got the system communication error after etching and unloading one wafer. rebooted computer but no help. also tried to press the red reset button, but the load plate started shaking violently. right now the machine is unusable. From cbaxter at snf.stanford.edu Sun Sep 4 21:32:02 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 4 Sep 2011 21:32:02 -0700 Subject: Comment stsetch SNF 2011-09-04 21:32:02: DO NOT RESET THE TOOL Message-ID: Please do not try to reset the tool, if the system faulted or any error shutdown the tool and inform the lab equipment maintenace.....Thank You.. From cbaxter at snf.stanford.edu Sun Sep 4 21:50:37 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 4 Sep 2011 21:50:37 -0700 Subject: Problem stsetch SNF 2011-09-04 14:47:51: system communication error Message-ID: Recovered the tool, handler now communicating. I ran a 20mins o2 clean w/out problem. From latta at snf.stanford.edu Thu Sep 15 11:56:09 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 15 Sep 2011 11:56:09 -0700 Subject: Problem stsetch SNF 2011-09-15 11:56:08: He flow is at 4.01 Message-ID: From latta at snf.stanford.edu Thu Sep 15 15:05:02 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 15 Sep 2011 15:05:02 -0700 Subject: Comment stsetch SNF 2011-09-15 15:05:01: Sept qual Message-ID: DEEP 00:10:00 Si ER =2.02um/min PR ER = 224A/min Sel = 90:1 From nharjee at snf.stanford.edu Sun Sep 18 13:18:14 2011 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Sun, 18 Sep 2011 13:18:14 -0700 Subject: Problem stsetch SNF 2011-09-18 13:18:14: Wafer piece found in chamber Message-ID: Unreported by previous user. From bchui at snf.stanford.edu Mon Sep 19 01:40:59 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Mon, 19 Sep 2011 01:40:59 -0700 Subject: Shutdown stsetch SNF 2011-09-19 01:40:58: No plasma Message-ID: Tried to run recipe "DEEP", machine kept giving "COIL POWER OUT OF TOLERANCE" error. When I tried the recipe again, the screen showed no errors (and the plasma graphic was on) but in actuality the chamber had no plasma (only occasional flashes). From eenriquez at snf.stanford.edu Mon Sep 19 14:38:24 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 19 Sep 2011 14:38:24 -0700 Subject: Comment stsetch SNF 2011-09-19 14:38:24: Update No plasma Message-ID: Found a damaged varistor inside the RF generator. Need to replace. We will try to extract one from one of our spare, non-functioning generators. From eenriquez at snf.stanford.edu Tue Sep 20 10:16:58 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 20 Sep 2011 10:16:58 -0700 Subject: Comment stsetch SNF 2011-09-20 10:16:58: Update RF generator Message-ID: Ordered replacement part. It should be here by the end of the week. From eenriquez at snf.stanford.edu Thu Sep 22 15:04:21 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 22 Sep 2011 15:04:21 -0700 Subject: Problem stsetch SNF 2011-09-15 11:56:08: He flow is at 4.01 Message-ID: Cleaned the electrode and lip seal. From eenriquez at snf.stanford.edu Thu Sep 22 15:04:35 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 22 Sep 2011 15:04:35 -0700 Subject: Problem stsetch SNF 2011-09-18 13:18:14: Wafer piece found in chamber Message-ID: Cleaned the chamber. From eenriquez at snf.stanford.edu Thu Sep 22 15:06:02 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 22 Sep 2011 15:06:02 -0700 Subject: Shutdown stsetch SNF 2011-09-19 01:40:58: No plasma Message-ID: Repaired the rf generator. Replaced a burnt out thermistor. From eenriquez at snf.stanford.edu Thu Sep 22 15:06:10 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 22 Sep 2011 15:06:10 -0700 Subject: Comment stsetch SNF 2011-09-19 14:38:24: Update No plasma Message-ID: archived From eenriquez at snf.stanford.edu Thu Sep 22 15:06:16 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 22 Sep 2011 15:06:16 -0700 Subject: Comment stsetch SNF 2011-09-20 10:16:58: Update RF generator Message-ID: Archived From bchui at snf.stanford.edu Fri Sep 23 18:42:21 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Fri, 23 Sep 2011 18:42:21 -0700 Subject: Shutdown stsetch SNF 2011-09-23 18:42:20: Wafer broken in chamber Message-ID: My wafer broke in the chamber. My apologies for letting this happen at the beginning of the weekend; I've let Staff know and we will see if we can retrieve the wafer earlier than Sunday or Monday. Thanks,Ben From cbaxter at snf.stanford.edu Sat Sep 24 18:01:45 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 24 Sep 2011 18:01:45 -0700 Subject: Shutdown stsetch SNF 2011-09-23 18:42:20: Wafer broken in chamber Message-ID: Reocvered broken wafer inside the chamber and wiped down chamber with ipa. Ran 30 mins O2 clean. From dongrip at snf.stanford.edu Sun Sep 25 15:58:46 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Sun, 25 Sep 2011 15:58:46 -0700 Subject: Shutdown stsetch SNF 2011-09-25 15:58:45: ICP lost. ICP not available alarm. Message-ID: ICP communications are lost. Can't do any process. My processing wafer is still inside the chamber. Please fix this issue... From eenriquez at snf.stanford.edu Mon Sep 26 09:08:32 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 26 Sep 2011 09:08:32 -0700 Subject: Shutdown stsetch SNF 2011-09-25 15:58:45: ICP lost. ICP not available alarm. Message-ID: Reset the computer. Also replaced the power back up batteries. Ran O2 plasma. From eszilagy at snf.stanford.edu Fri Sep 30 19:01:21 2011 From: eszilagy at snf.stanford.edu (eszilagy at snf.stanford.edu) Date: Fri, 30 Sep 2011 19:01:21 -0700 Subject: Shutdown stsetch SNF 2011-09-30 19:01:21: wafer broken on chuck Message-ID: Hi, My wafer failed to unload, and in looking inside at the chuck, there are a couple of pieces of it on the chuck. Erzsi