Problem stsetch SNF 2011-09-04 14:47:51: system communication error

xzhuan1 at xzhuan1 at
Sun Sep 4 14:47:51 PDT 2011

got the system communication error after etching and unloading one wafer. rebooted computer but no help. also tried to press the red reset button, but the load plate started shaking violently. right now the machine is unusable.

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