Shutdown stsetch SNF 2011-09-19 01:40:58: No plasma

bchui at snf.stanford.edu bchui at snf.stanford.edu
Mon Sep 19 01:40:59 PDT 2011


Tried to run recipe "DEEP", machine kept giving "COIL POWER OUT OF TOLERANCE" error.  When I tried the recipe again, the screen showed no errors (and the plasma graphic was on) but in actuality the chamber had no plasma (only occasional flashes).




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