Problem stsetch SNF 2011-09-18 13:18:14: Wafer piece found in chamber
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Thu Sep 22 15:04:35 PDT 2011
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Problem stsetch SNF 2011-09-18 13:18:14: Wafer piece found in chamber
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Shutdown stsetch SNF 2011-09-19 01:40:58: No plasma
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Cleaned the chamber.
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Problem stsetch SNF 2011-09-18 13:18:14: Wafer piece found in chamber
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Shutdown stsetch SNF 2011-09-19 01:40:58: No plasma
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