Shutdown stsetch SNF 2011-09-23 18:42:20: Wafer broken in chamber

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Sat Sep 24 18:01:45 PDT 2011

Previous message: Shutdown stsetch SNF 2011-09-23 18:42:20: Wafer broken in chamber
Next message: Shutdown stsetch SNF 2011-09-25 15:58:45: ICP lost. ICP not available alarm.
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Reocvered broken wafer inside the chamber and wiped
down chamber with ipa. Ran 30 mins O2 clean.

Previous message: Shutdown stsetch SNF 2011-09-23 18:42:20: Wafer broken in chamber
Next message: Shutdown stsetch SNF 2011-09-25 15:58:45: ICP lost. ICP not available alarm.
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the stsetch-pcs mailing list