Shutdown stsetch SNF 2011-09-23 18:42:20: Wafer broken in chamber

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Sat Sep 24 18:01:45 PDT 2011


Reocvered broken wafer inside the chamber and wiped
down chamber with ipa. Ran 30 mins O2 clean.




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