Shutdown stsetch SNF 2011-09-25 15:58:45: ICP lost. ICP not available alarm.

dongrip at snf.stanford.edu dongrip at snf.stanford.edu
Sun Sep 25 15:58:46 PDT 2011


ICP communications are lost. Can't do any process. My processing wafer is still inside the chamber. Please fix this issue...




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