Shutdown stsetch SNF 2011-09-30 19:01:21: wafer broken on chuck

eszilagy at snf.stanford.edu eszilagy at snf.stanford.edu
Fri Sep 30 19:01:21 PDT 2011


Hi,
My wafer failed to unload, and in looking inside at the chuck, there are a couple of pieces of it on the chuck. 
Erzsi




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