Shutdown stsetch SNF 2011-09-30 19:01:21: wafer broken on chuck

eszilagy at snf.stanford.edu eszilagy at snf.stanford.edu
Fri Sep 30 19:01:21 PDT 2011

Previous message: Shutdown stsetch SNF 2011-09-25 15:58:45: ICP lost. ICP not available alarm.
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Hi,
My wafer failed to unload, and in looking inside at the chuck, there are a couple of pieces of it on the chuck. 
Erzsi

Previous message: Shutdown stsetch SNF 2011-09-25 15:58:45: ICP lost. ICP not available alarm.
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the stsetch-pcs mailing list