From eenriquez at snf.stanford.edu Wed Apr 4 08:55:43 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 4 Apr 2012 08:55:43 -0700 Subject: Comment stsetch SNF 2012-02-09 09:46:56: Completed monthly pm Message-ID: Archived From eenriquez at snf.stanford.edu Wed Apr 4 08:57:39 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 4 Apr 2012 08:57:39 -0700 Subject: Shutdown stsetch SNF 2012-04-04 08:57:38: High chamber leak rate Message-ID: Chamber failed for high leak rate during Monthly PM checks. From eenriquez at snf.stanford.edu Wed Apr 4 11:01:56 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 4 Apr 2012 11:01:56 -0700 Subject: Shutdown stsetch SNF 2012-04-04 08:57:38: High chamber leak rate Message-ID: Cleaned chamber door o-ring. Completed monthly pm From npapte at snf.stanford.edu Sun Apr 22 16:37:49 2012 From: npapte at snf.stanford.edu (npapte at snf.stanford.edu) Date: Sun, 22 Apr 2012 16:37:49 -0700 Subject: Problem stsetch SNF 2012-04-22 16:37:49: "ICP not available alarm" Message-ID: Machine gave an "ICP not available" alarm when trying to load wafer. I was able to vent the exchange chamber & remove my wafer, but now none of the buttons on the software are highlighted, and I can't use the machine From xzhuan1 at snf.stanford.edu Sun Apr 22 17:53:02 2012 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Sun, 22 Apr 2012 17:53:02 -0700 Subject: Comment stsetch SNF 2012-04-22 17:53:02: machine runs fine now Message-ID: I restarted the computer and the icp unavailable error went away. Ran a test wafer and everything seems to be OK now. From cbaxter at snf.stanford.edu Sun Apr 22 18:03:45 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 22 Apr 2012 18:03:45 -0700 Subject: Problem stsetch SNF 2012-04-22 16:37:49: "ICP not available alarm" Message-ID: From dongrip at snf.stanford.edu Tue Apr 24 13:03:23 2012 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Tue, 24 Apr 2012 13:03:23 -0700 Subject: Problem stsetch SNF 2012-04-24 13:03:22: He Back Flow Rate Message-ID: I observed high He back flow rate, close to 5.00. Can any of users confirm this flow rate? Although the flow rate was stable, the value as 5.00 seems too high. From eenriquez at snf.stanford.edu Wed Apr 25 07:39:00 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Apr 2012 07:39:00 -0700 Subject: Problem stsetch SNF 2012-04-24 13:03:22: He Back Flow Rate Message-ID: Adjusted the He cooling bypass flow. Now He cooling flow is about 3.75. From latta at snf.stanford.edu Thu Apr 26 15:38:49 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 26 Apr 2012 15:38:49 -0700 Subject: Comment stsetch SNF 2012-04-26 15:38:49: Qual after He flow set back to 3.75 from 5.0 Message-ID: DEEP 00:10:00 Si ER = 2.38um/min, PR ER = 287A/min, Sel = 83:1 From latta at snf.stanford.edu Thu Apr 26 15:39:02 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 26 Apr 2012 15:39:02 -0700 Subject: Comment stsetch SNF 2012-03-29 15:31:33: April (well, late Mar) Qual Message-ID: newer qual posted From latta at snf.stanford.edu Thu Apr 26 15:39:26 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 26 Apr 2012 15:39:26 -0700 Subject: Comment stsetch SNF 2012-04-22 17:53:02: machine runs fine now Message-ID: archived From dongrip at snf.stanford.edu Mon Apr 30 01:51:48 2012 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Mon, 30 Apr 2012 01:51:48 -0700 Subject: Shutdown stsetch SNF 2012-04-30 01:51:47: ICP failure Message-ID: can't do anything...processing wafer is still inside the chamber. From eenriquez at snf.stanford.edu Mon Apr 30 08:37:13 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 30 Apr 2012 08:37:13 -0700 Subject: Shutdown stsetch SNF 2012-04-30 01:51:47: ICP failure Message-ID: Reset the computer. Cycled a wafer with no problems.