Problem stsetch SNF 2012-04-22 16:37:49: "ICP not available alarm"

npapte at npapte at
Sun Apr 22 16:37:49 PDT 2012

Machine gave an "ICP not available" alarm when trying to load wafer. I was able to vent the exchange chamber & remove my wafer, but now none of the buttons on the software are highlighted, and I can't use the machine

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