Comment stsetch SNF 2012-04-26 15:38:49: Qual after He flow set back to 3.75 from 5.0

latta at snf.stanford.edu latta at snf.stanford.edu
Thu Apr 26 15:38:49 PDT 2012

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DEEP 00:10:00
Si ER = 2.38um/min, PR ER = 287A/min,  Sel = 83:1

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