From eenriquez at snf.stanford.edu Tue Feb 7 12:06:43 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 7 Feb 2012 12:06:43 -0800 Subject: Shutdown stsetch SNF 2011-12-14 17:05:25: Scheduled shutdown Message-ID: System has been restarted. From eenriquez at snf.stanford.edu Wed Feb 8 07:49:59 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 8 Feb 2012 07:49:59 -0800 Subject: Shutdown stsetch SNF 2012-02-08 07:49:59: Facility work Message-ID: From eenriquez at snf.stanford.edu Thu Feb 9 09:46:56 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 9 Feb 2012 09:46:56 -0800 Subject: Comment stsetch SNF 2012-02-09 09:46:56: Completed monthly pm Message-ID: Ready for process qualification From latta at snf.stanford.edu Tue Feb 14 10:20:39 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 14 Feb 2012 10:20:39 -0800 Subject: Shutdown stsetch SNF 2012-02-14 10:20:38: crashed turbo, I think Message-ID: During LOAD step the turbo sounds like it wound down. There was a clanking sound.... From latta at snf.stanford.edu Tue Feb 14 11:49:13 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 14 Feb 2012 11:49:13 -0800 Subject: Problem stsetch SNF 2012-02-14 11:49:12: He flow high during etch = 4.66 Message-ID: From latta at snf.stanford.edu Tue Feb 14 11:49:37 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 14 Feb 2012 11:49:37 -0800 Subject: Shutdown stsetch SNF 2012-02-14 10:20:38: crashed turbo, I think Message-ID: Back up and running From latta at snf.stanford.edu Tue Feb 14 11:49:55 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 14 Feb 2012 11:49:55 -0800 Subject: Shutdown stsetch SNF 2012-02-08 07:49:59: Facility work Message-ID: work complete From latta at snf.stanford.edu Tue Feb 14 11:50:30 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 14 Feb 2012 11:50:30 -0800 Subject: Problem stsetch SNF 2011-12-06 23:30:59: Load arm movement is sluggish Message-ID: no longer a problem From latta at snf.stanford.edu Tue Feb 14 11:50:43 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 14 Feb 2012 11:50:43 -0800 Subject: Problem stsetch SNF 2011-12-06 06:11:22: compressed air fault Message-ID: ok now From latta at snf.stanford.edu Tue Feb 14 11:50:57 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 14 Feb 2012 11:50:57 -0800 Subject: Comment stsetch SNF 2011-12-04 18:47:59: Turbo Pump Message-ID: archived From latta at snf.stanford.edu Tue Feb 14 11:51:08 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 14 Feb 2012 11:51:08 -0800 Subject: Problem stsetch SNF 2011-12-04 18:34:24: loading arm was stuck temporarily Message-ID: arm fixed From latta at snf.stanford.edu Tue Feb 14 11:51:21 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 14 Feb 2012 11:51:21 -0800 Subject: Comment stsetch SNF 2011-12-02 21:54:06: wafer loading speed: rectificative Message-ID: ok now From latta at snf.stanford.edu Tue Feb 14 11:51:29 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 14 Feb 2012 11:51:29 -0800 Subject: Comment stsetch SNF 2011-12-02 20:17:41: wafer loading is often very slow Message-ID: ok now From latta at snf.stanford.edu Tue Feb 14 17:39:20 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 14 Feb 2012 17:39:20 -0800 Subject: Comment stsetch SNF 2012-02-14 17:39:20: Feb qual Message-ID: Qual wafer #1 Si ER = 2.11um/min, PR ER + 236A/min, Sel + 89:1 Qual wafer #2 Si ER = 2.11um/min, PR ER = 232A/min, Sel = 90:1 From eenriquez at snf.stanford.edu Wed Feb 15 08:14:45 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Feb 2012 08:14:45 -0800 Subject: Problem stsetch SNF 2012-02-14 11:49:12: He flow high during etch = 4.66 Message-ID: Replaced the wafer cooling lip seal From swlee81 at snf.stanford.edu Wed Feb 22 12:10:55 2012 From: swlee81 at snf.stanford.edu (swlee81 at snf.stanford.edu) Date: Wed, 22 Feb 2012 12:10:55 -0800 Subject: Shutdown stsetch SNF 2012-02-22 12:10:55: System error has occured during loading sample. Message-ID: When 'load' butten is pressed for loading the sample, machine was stoped with some impulsive noise. From cbaxter at snf.stanford.edu Wed Feb 22 15:50:16 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 22 Feb 2012 15:50:16 -0800 Subject: Shutdown stsetch SNF 2012-02-22 12:10:55: System error has occured during loading sample. Message-ID: Manually homed load arm and reset the system. Ramped turbo to speed and cycled load arm in and out from the chamber w/out problem.