Problem stsetch SNF 2012-02-14 11:49:12: He flow high during etch = 4.66
latta at snf.stanford.edu
latta at snf.stanford.edu
Tue Feb 14 11:49:13 PST 2012
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Shutdown stsetch SNF 2012-02-14 10:20:38: crashed turbo, I think
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Problem stsetch SNF 2012-02-14 11:49:12: He flow high during etch = 4.66
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Shutdown stsetch SNF 2012-02-14 10:20:38: crashed turbo, I think
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Problem stsetch SNF 2012-02-14 11:49:12: He flow high during etch = 4.66
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