Problem stsetch SNF 2011-12-04 18:34:24: loading arm was stuck temporarily
latta at snf.stanford.edu
latta at snf.stanford.edu
Tue Feb 14 11:51:08 PST 2012
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Comment stsetch SNF 2011-12-04 18:47:59: Turbo Pump
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Comment stsetch SNF 2011-12-02 21:54:06: wafer loading speed: rectificative
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arm fixed
Previous message:
Comment stsetch SNF 2011-12-04 18:47:59: Turbo Pump
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Comment stsetch SNF 2011-12-02 21:54:06: wafer loading speed: rectificative
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