Comment stsetch SNF 2012-02-14 17:39:20: Feb qual

latta at snf.stanford.edu latta at snf.stanford.edu
Tue Feb 14 17:39:20 PST 2012


Qual wafer #1
Si ER = 2.11um/min, PR ER + 236A/min, Sel + 89:1
Qual wafer #2
Si ER = 2.11um/min, PR ER = 232A/min, Sel = 90:1




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