Problem stsetch SNF 2012-02-14 11:49:12: He flow high during etch = 4.66
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Wed Feb 15 08:14:45 PST 2012
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Problem stsetch SNF 2012-02-14 11:49:12: He flow high during etch = 4.66
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Problem stsetch SNF 2011-12-06 23:30:59: Load arm movement is sluggish
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Replaced the wafer cooling lip seal
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Problem stsetch SNF 2012-02-14 11:49:12: He flow high during etch = 4.66
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Problem stsetch SNF 2011-12-06 23:30:59: Load arm movement is sluggish
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