From mtang at snf.stanford.edu Sun Jul 1 09:08:22 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sun, 1 Jul 2012 09:08:22 -0700 Subject: Comment stsetch SNF 2012-07-01 09:08:22: C4F8 Message-ID: As per Elmer, pressure changes due to the C4F8 bottle change has likely resulted in condensation of freon in parts of the gas line. Will likely have to pump out the entire line and reintroduce gas slowly. Have reserved stsetch for Monday am. From eenriquez at snf.stanford.edu Mon Jul 2 15:00:35 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 2 Jul 2012 15:00:35 -0700 Subject: Comment stsetch SNF 2012-07-02 15:00:35: Pumping C4F8 overnight Message-ID: From eenriquez at snf.stanford.edu Tue Jul 3 08:23:26 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 3 Jul 2012 08:23:26 -0700 Subject: Problem stsetch SNF 2012-06-28 21:28:38: Alarms Message-ID: Pumped out and lowered c4f8 delivery pressure. From eenriquez at snf.stanford.edu Tue Jul 3 08:29:19 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 3 Jul 2012 08:29:19 -0700 Subject: Problem stsetch SNF 2012-06-29 10:03:54: C4F8 unstable Message-ID: Pumped out the gas line and lowered the c4f8 delivery pressure. From eenriquez at snf.stanford.edu Tue Jul 3 08:29:26 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 3 Jul 2012 08:29:26 -0700 Subject: Comment stsetch SNF 2012-06-29 16:07:10: C4F8 flow still bad, not recommended for DEEP Message-ID: Pumped out the gas line and lowered the c4f8 delivery pressure. From eenriquez at snf.stanford.edu Tue Jul 3 08:29:32 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 3 Jul 2012 08:29:32 -0700 Subject: Comment stsetch SNF 2012-07-01 09:08:22: C4F8 Message-ID: Pumped out the gas line and lowered the c4f8 delivery pressure. From eenriquez at snf.stanford.edu Tue Jul 3 08:29:48 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 3 Jul 2012 08:29:48 -0700 Subject: Comment stsetch SNF 2012-07-02 15:00:35: Pumping C4F8 overnight Message-ID: Archived From latta at snf.stanford.edu Fri Jul 6 16:50:44 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 6 Jul 2012 16:50:44 -0700 Subject: Problem stsetch SNF 2012-07-06 16:50:43: Qual after C4F8 flush Message-ID: DEEP 00:10:00 Si ER = 1.96um/min, PR ER = 221A/min, Sel = 89:1 From latta at snf.stanford.edu Fri Jul 6 16:50:56 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 6 Jul 2012 16:50:56 -0700 Subject: Comment stsetch SNF 2012-06-27 16:32:22: July qual (and after C4F8 replacement) Message-ID: archived From latta at snf.stanford.edu Fri Jul 6 16:52:28 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 6 Jul 2012 16:52:28 -0700 Subject: Comment stsetch SNF 2012-07-06 16:52:27: Qual after C4F8 flush Message-ID: DEEP 00:10:00 Si ER = 1.96um/min, PR ER = 221A/min, Sel = 89:1 From latta at snf.stanford.edu Fri Jul 6 16:52:41 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 6 Jul 2012 16:52:41 -0700 Subject: Problem stsetch SNF 2012-07-06 16:50:43: Qual after C4F8 flush Message-ID: oppps- meant as a comment. From latta at snf.stanford.edu Fri Jul 20 14:34:48 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 20 Jul 2012 14:34:48 -0700 Subject: Shutdown stsetch SNF 2012-07-20 14:34:48: communications timeout error..... Message-ID: From cbaxter at snf.stanford.edu Fri Jul 20 21:20:38 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 20 Jul 2012 21:20:38 -0700 Subject: Shutdown stsetch SNF 2012-07-20 14:34:48: communications timeout error..... Message-ID: The has air leak, repaired leak and reboot system. From malekos at snf.stanford.edu Sun Jul 22 10:59:27 2012 From: malekos at snf.stanford.edu (malekos at snf.stanford.edu) Date: Sun, 22 Jul 2012 10:59:27 -0700 Subject: Shutdown stsetch SNF 2012-07-22 10:59:27: broke wafer Message-ID: From cbaxter at snf.stanford.edu Sun Jul 22 17:42:50 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 22 Jul 2012 17:42:50 -0700 Subject: Shutdown stsetch SNF 2012-07-22 10:59:27: broke wafer Message-ID: Vented chamber and vacuum broken wafer chips.. From latta at snf.stanford.edu Tue Jul 24 13:49:42 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 24 Jul 2012 13:49:42 -0700 Subject: Comment stsetch SNF 2012-07-24 13:49:42: He flow rate getting high- 4.00 Message-ID: From latta at snf.stanford.edu Wed Jul 25 14:52:45 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 25 Jul 2012 14:52:45 -0700 Subject: Problem stsetch SNF 2012-07-25 14:52:44: He flow at 4.03 durning RF Message-ID: From latta at snf.stanford.edu Wed Jul 25 14:53:15 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 25 Jul 2012 14:53:15 -0700 Subject: Problem stsetch SNF 2012-07-25 14:53:14: SF6 jumpy- 115-140sccm Message-ID: From eenriquez at snf.stanford.edu Thu Jul 26 10:18:59 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 26 Jul 2012 10:18:59 -0700 Subject: Problem stsetch SNF 2012-07-25 14:53:14: SF6 jumpy- 115-140sccm Message-ID: Delivery pressure was a little high (13 psi) lowered back down to 10 psi From eenriquez at snf.stanford.edu Thu Jul 26 10:19:28 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 26 Jul 2012 10:19:28 -0700 Subject: Problem stsetch SNF 2012-07-25 14:52:44: He flow at 4.03 durning RF Message-ID: Wiped down the lip seal From eenriquez at snf.stanford.edu Thu Jul 26 10:19:43 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 26 Jul 2012 10:19:43 -0700 Subject: Comment stsetch SNF 2012-07-24 13:49:42: He flow rate getting high- 4.00 Message-ID: Cleaned the lip seal From latta at snf.stanford.edu Fri Jul 27 15:23:39 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 27 Jul 2012 15:23:39 -0700 Subject: Comment stsetch SNF 2012-07-27 15:23:38: Qual 21 July Message-ID: DEEP 00:10:00 Si ER = 2.27um/min, PR ER = 241A/min, Sel = 94:1 Note; the He flow was adjusted after this qual was run. It went from 4.03 to 3.78. From latta at snf.stanford.edu Fri Jul 27 15:24:03 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 27 Jul 2012 15:24:03 -0700 Subject: Comment stsetch SNF 2012-07-06 16:52:27: Qual after C4F8 flush Message-ID: newer qual run