Comment stsetch SNF 2012-07-06 16:52:27: Qual after C4F8 flush

latta at snf.stanford.edu latta at snf.stanford.edu
Fri Jul 6 16:52:28 PDT 2012

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DEEP 00:10:00
Si ER = 1.96um/min, PR ER = 221A/min,  Sel = 89:1

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