Shutdown stsetch SNF 2012-07-22 10:59:27: broke wafer
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Sun Jul 22 17:42:50 PDT 2012
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Shutdown stsetch SNF 2012-07-22 10:59:27: broke wafer
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Comment stsetch SNF 2012-07-24 13:49:42: He flow rate getting high- 4.00
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Vented chamber and vacuum broken wafer chips..
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Shutdown stsetch SNF 2012-07-22 10:59:27: broke wafer
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Comment stsetch SNF 2012-07-24 13:49:42: He flow rate getting high- 4.00
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