From latta at snf.stanford.edu Fri Jun 8 15:00:06 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 8 Jun 2012 15:00:06 -0700 Subject: Comment stsetch SNF 2012-06-08 15:00:05: qual 7 Jun Message-ID: DEEP 00:10:00 Si ER = 1.98um/min, PR ER = 234A/min, Sel = 85:1 From latta at snf.stanford.edu Fri Jun 8 15:00:16 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 8 Jun 2012 15:00:16 -0700 Subject: Comment stsetch SNF 2012-05-24 12:34:47: Qual 5/24 2012 Message-ID: archived From mtang at snf.stanford.edu Tue Jun 26 06:26:22 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 26 Jun 2012 06:26:22 -0700 Subject: Shutdown stsetch SNF 2012-06-26 06:26:21: No C4F8 Message-ID: C4F8 is running dangerously low. Replacement cylinder was delayed due to purchasing issues. It is due in today. Will update later today. From mtang at snf.stanford.edu Tue Jun 26 13:50:31 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 26 Jun 2012 13:50:31 -0700 Subject: Comment stsetch SNF 2012-06-26 13:50:30: Freon 318 Due tomorrow Message-ID: The freon replacement cylinder is due Wednesday, Thursday at latest. From latta at snf.stanford.edu Wed Jun 27 16:30:56 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 27 Jun 2012 16:30:56 -0700 Subject: Shutdown stsetch SNF 2012-06-26 06:26:21: No C4F8 Message-ID: Gas in, online, qual'ed and looking good. From latta at snf.stanford.edu Wed Jun 27 16:31:09 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 27 Jun 2012 16:31:09 -0700 Subject: Comment stsetch SNF 2012-06-26 13:50:30: Freon 318 Due tomorrow Message-ID: yes From latta at snf.stanford.edu Wed Jun 27 16:32:23 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 27 Jun 2012 16:32:23 -0700 Subject: Comment stsetch SNF 2012-06-27 16:32:22: July qual (and after C4F8 replacement) Message-ID: DEEP 00:10:00 Si ER = 2.24um/min, PR ER = 232A/min, Sel = 97:1 From latta at snf.stanford.edu Wed Jun 27 16:32:37 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 27 Jun 2012 16:32:37 -0700 Subject: Comment stsetch SNF 2012-06-08 15:00:05: qual 7 Jun Message-ID: new qual posted From latta at snf.stanford.edu Fri Jun 29 10:03:55 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 29 Jun 2012 10:03:55 -0700 Subject: Problem stsetch SNF 2012-06-29 10:03:54: C4F8 unstable Message-ID: Intermittantly jumps from not getting to 85 (DEEP) to over shooting. From bchui at snf.stanford.edu Fri Jun 29 16:07:11 2012 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Fri, 29 Jun 2012 16:07:11 -0700 Subject: Comment stsetch SNF 2012-06-29 16:07:10: C4F8 flow still bad, not recommended for DEEP Message-ID: Per Mary Tang's instructions I closed the C4F8 valve, pumped out the line and reopened the valve slowly in the hope of clearing any clogs in the C4F8 MFC. It didn't seem to help; flow is still unstable and machine errors out (tolerance error) within 15 min of starting DEEP. We are not yet red-lighting the machine because it could conceivably still be used for non-critical etches (e.g. SF6-only recipes) over the weekend, but it will likely be red-lighted by the end of the weekend to reflect its true status.