From latta at snf.stanford.edu Thu Mar 1 14:22:32 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 1 Mar 2012 14:22:32 -0800 Subject: Shutdown stsetch SNF 2012-03-01 14:22:31: Turbo off- Message-ID: At loading that nasty clanking sound occured and the turbo is showing E006.... From cbaxter at snf.stanford.edu Thu Mar 1 16:46:52 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 1 Mar 2012 16:46:52 -0800 Subject: Shutdown stsetch SNF 2012-03-01 14:22:31: Turbo off- Message-ID: Recovered the tool and added fomblin oil on the root blower. Also, tighten couple of the losse kf40 clamp. Cycled ran the tool w/out problem. From latta at snf.stanford.edu Fri Mar 2 13:37:38 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Mar 2012 13:37:38 -0800 Subject: Comment stsetch SNF 2012-03-02 13:37:38: Mar Qual Message-ID: DEEP 00:10:00 Si ER = 2.3um/min, PR ER + 259A/min, Sel + 89:1 From latta at snf.stanford.edu Fri Mar 2 13:37:52 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Mar 2012 13:37:52 -0800 Subject: Comment stsetch SNF 2012-02-14 17:39:20: Feb qual Message-ID: archived From mislam at snf.stanford.edu Sat Mar 3 13:48:25 2012 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sat, 3 Mar 2012 13:48:25 -0800 Subject: Problem stsetch SNF 2012-03-03 13:48:24: LL not pumping Message-ID: Turbopump control panel (Pfeiffer) shows an error From cbaxter at snf.stanford.edu Sun Mar 4 07:10:49 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 4 Mar 2012 07:10:49 -0800 Subject: Problem stsetch SNF 2012-03-03 13:48:24: LL not pumping Message-ID: Added oil to load lock pump. From mdickey at snf.stanford.edu Mon Mar 5 08:31:44 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 5 Mar 2012 08:31:44 -0800 Subject: Shutdown stsetch SNF 2012-03-05 08:31:44: water Message-ID: process cooling water is down From eenriquez at snf.stanford.edu Mon Mar 5 12:38:13 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 5 Mar 2012 12:38:13 -0800 Subject: Shutdown stsetch SNF 2012-03-05 08:31:44: water Message-ID: PCW is OK From egarnett at snf.stanford.edu Thu Mar 8 12:51:51 2012 From: egarnett at snf.stanford.edu (egarnett at snf.stanford.edu) Date: Thu, 8 Mar 2012 12:51:51 -0800 Subject: Problem stsetch SNF 2012-03-08 12:51:51: compressed air interuption Message-ID: My etch stopped sometime in the middle with the error "compressed air interuption". Wafer seed fine when I took it out but I'm not sure how long it etched before the fault. From eenriquez at snf.stanford.edu Fri Mar 9 08:54:19 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 9 Mar 2012 08:54:19 -0800 Subject: Problem stsetch SNF 2012-03-08 12:51:51: compressed air interuption Message-ID: Unable to duplicate the problem. From egarnett at snf.stanford.edu Tue Mar 20 08:22:47 2012 From: egarnett at snf.stanford.edu (egarnett at snf.stanford.edu) Date: Tue, 20 Mar 2012 08:22:47 -0700 Subject: Problem stsetch SNF 2012-03-20 08:22:47: chamber won't vent Message-ID: Can't use the stsetch because the chamber won't vent. From eenriquez at snf.stanford.edu Tue Mar 20 12:17:59 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 20 Mar 2012 12:17:59 -0700 Subject: Problem stsetch SNF 2012-03-20 08:22:47: chamber won't vent Message-ID: Rebooted the computer. From latta at snf.stanford.edu Thu Mar 29 15:31:34 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 29 Mar 2012 15:31:34 -0700 Subject: Comment stsetch SNF 2012-03-29 15:31:33: April (well, late Mar) Qual Message-ID: DEEP 00:10:00 Si ER = 2.12um/min, PR ER + 285A/min, Sel = 74:1 From latta at snf.stanford.edu Thu Mar 29 15:31:47 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 29 Mar 2012 15:31:47 -0700 Subject: Comment stsetch SNF 2012-03-02 13:37:38: Mar Qual Message-ID: archived