Problem stsetch SNF 2012-03-08 12:51:51: compressed air interuption

egarnett at snf.stanford.edu egarnett at snf.stanford.edu
Thu Mar 8 12:51:51 PST 2012


My etch stopped sometime in the middle with the error "compressed air interuption".  Wafer seed fine when I took it out but I'm not sure how long it etched before the fault.




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