From franklin at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: franklin at snf.stanford.edu (franklin at snf.stanford.edu) Date: Apr 14, 2000 Subject: Problem stsetch: communications error Message-ID: Twice during my runs the STSETCH has crashed mid run. It gives me the message "communications error, timed out" and then the program crashes. It starts back up in Start Up mode and then i switch to Administrator mode and it appears to have made it through the crash w/o affecting the process. I'm giving up now with my second wafer. nate From franklin at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: franklin at snf.stanford.edu (franklin at snf.stanford.edu) Date: Apr 14, 2000 Subject: Problem stsetch: clarification on stsetch Message-ID: The error reads actually "Operator station shutdown, communications error" hope this helps nate From booth at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 14, 2000 Subject: Problem Clear stsetch: restarted control software Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 14, 2000 Subject: Problem Clear stsetch: restarted control software. Message-ID: From sjlee at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: sjlee at snf.stanford.edu (sjlee at snf.stanford.edu) Date: Apr 15, 2000 Subject: Shutdown stsetch: Wafer robot problem...failed to pickup during unload Message-ID: Wafer robot problem...failed to pickup during unload From cbaxter at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 18, 2000 Subject: Shutdown stsetch: Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 18, 2000 Subject: Shutdown Clear stsetch: removed transfer belt and manually transfer arm out from the chmabr Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 18, 2000 Subject: Shutdown Clear stsetch: Message-ID: From franklin at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: franklin at snf.stanford.edu (franklin at snf.stanford.edu) Date: Apr 19, 2000 Subject: Shutdown stsetch: stsfailure Message-ID: STS shutdown near the end of a 22min run. Turbo pump stopped, and gave the message "gate valve opened". Wafer is still currently in the machine. From booth at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 20, 2000 Subject: Shutdown Clear stsetch: removed wafer from STS Message-ID: From franklin at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: franklin at snf.stanford.edu (franklin at snf.stanford.edu) Date: Apr 20, 2000 Subject: Shutdown stsetch: stsetch load arm stuck!!! Message-ID: Load arm is stuck midway in unloading process. Wafer is still in wafer holder. Squeaking noise which has been on STS recently during load/unload finally has caused a problem. STS is still squeaking as it is trying to unload the wafer. nate franklin From booth at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 21, 2000 Subject: Shutdown Clear stsetch: repaired wafer transport drive. Message-ID: From chcheng at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: chcheng at snf.stanford.edu (chcheng at snf.stanford.edu) Date: Apr 23, 2000 Subject: Shutdown stsetch: Message-ID: Pump Failure. A wafer is inside the chamber. From booth at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 24, 2000 Subject: Shutdown Clear stsetch: removed wafer & restarted machine. Message-ID: Installed manual gate valve in basement above blower with capacitance manometer for testing vacuum level the next time that the STS shuts itself off. Len From emc at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: emc at snf.stanford.edu (emc at snf.stanford.edu) Date: Apr 24, 2000 Subject: Shutdown stsetch: gate valve error Message-ID: in the middle of an etch this error occured, stopping the plasma and subsequently the pump... seems like a tough intermittent error, as it occured this weekend too... From booth at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 26, 2000 Subject: Shutdown Clear stsetch: New LoadLock controller etc. installed!. Message-ID: From kotovsky at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: kotovsky at snf.stanford.edu (kotovsky at snf.stanford.edu) Date: May 1, 2000 Subject: Problem stsetch: sts etch software problem Message-ID: The software that controls the STS etch crapped out on me 3 times in 40 minutes of work on the machine. It givesa communications timeout error and the operating station must be restarted. cheers, Jack From cbaxter at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 1, 2000 Subject: Problem Clear stsetch: software was reset earlier today Message-ID: From pruitt at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: pruitt at snf.stanford.edu (pruitt at snf.stanford.edu) Date: May 2, 2000 Subject: Problem stsetch: die in sts chamber Message-ID: from pruitt at 1:30 am Tues. 2 die in chamber, clear of chuck and loading mechanism... From pruitt at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: pruitt at snf.stanford.edu (pruitt at snf.stanford.edu) Date: May 2, 2000 Subject: Shutdown stsetch: die in chamber Message-ID: this should probably be a shutdown, not sure... From booth at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 2, 2000 Subject: Shutdown Clear stsetch: removed pieces Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 2, 2000 Subject: Problem Clear stsetch: Message-ID: From zhang at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: zhang at snf.stanford.edu (zhang at snf.stanford.edu) Date: May 9, 2000 Subject: Problem stsetch: Message-ID: STS computer monitor has very long time of delay without showing any error messages. From booth at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 9, 2000 Subject: Problem Clear stsetch: had to re-boot the PC. Message-ID: From latta at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: May 15, 2000 Subject: Shutdown stsetch: Chiller in basemsnt malfuctioned- platen RF not responding. Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 16, 2000 Subject: Shutdown Clear stsetch: changed flow meter... Message-ID: From chcheng at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: chcheng at snf.stanford.edu (chcheng at snf.stanford.edu) Date: May 16, 2000 Subject: Shutdown stsetch: Interlock tripped, turbo pump slowed down Message-ID: Interlock tripped, turbo pump slowed down, the wafer is still inside the chamber From cbaxter at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 17, 2000 Subject: Shutdown stsetch: system shutdown, no power to the turbo controller and system won't communicate.. Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 17, 2000 Subject: Shutdown Clear stsetch: rebooth and remove wafer from chamber Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 17, 2000 Subject: Shutdown Clear stsetch: rebooth system... Message-ID: From latta at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jun 5, 2000 Subject: Shutdown stsetch: Out of C4F8. Message-ID: From latta at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jun 6, 2000 Subject: Shutdown Clear stsetch: C4F8 cylinder replaced! Message-ID: From jac at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: jac at snf.stanford.edu (jac at snf.stanford.edu) Date: Jun 6, 2000 Subject: Problem stsetch: wafer stuck in loadlock Message-ID: the loadlock will neither pumpdown nor vent, the software registers a fault and will allow no further action. my wafer is in the loadlock. jac at crystal From latta at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jun 7, 2000 Subject: Problem Clear stsetch: Len added oil, rebooted system. Message-ID: From mourlas at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: mourlas at snf.stanford.edu (mourlas at snf.stanford.edu) Date: Jun 8, 2000 Subject: Problem stsetch: Message-ID: wafer broke in chamber after ~150 um etch (550 um wafer) durin the unload. From booth at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 8, 2000 Subject: Problem Clear stsetch: cleaned out broken wafer. Message-ID: From caudillo at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: caudillo at snf.stanford.edu (caudillo at snf.stanford.edu) Date: Jun 14, 2000 Subject: Problem stsetch: Main window for multiplex closed.Searching for the right icon to open cause screen lockup. Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 14, 2000 Subject: Problem Clear stsetch: restarted system software. Message-ID: From caudillo at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: caudillo at snf.stanford.edu (caudillo at snf.stanford.edu) Date: Jun 14, 2000 Subject: Comment stsetch: Gen. Fault occured.Len reset. Message-ID: From caudillo at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: caudillo at snf.stanford.edu (caudillo at snf.stanford.edu) Date: Jun 22, 2000 Subject: Shutdown stsetch: FAILED Gate open Alarm. Wafer in Chmbr. Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 22, 2000 Subject: Shutdown Clear stsetch: rebooted plant & control software. OK Message-ID: From zhang at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: zhang at snf.stanford.edu (zhang at snf.stanford.edu) Date: Jul 3, 2000 Subject: Problem stsetch: Message-ID: Date: July 2, 2000 Control windows on computer screen suddenly disappeared. But STS machine itself had been working well prior to that. Software upgrading was going on during that time. One wafer is left inside the chamber that I don't know how to retrieve. From latta at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jul 5, 2000 Subject: Problem Clear stsetch: Message-ID: PC re-booted, wafer retrived and seasooning performed. From chcheng at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: chcheng at snf.stanford.edu (chcheng at snf.stanford.edu) Date: Jul 5, 2000 Subject: Shutdown stsetch: Message-ID: The pump slowed down in the standby step after loading the wafer. From latta at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jul 6, 2000 Subject: Shutdown Clear stsetch: Cesar restarted pump, rebooted PC, wafer removed, seasoning performed. Message-ID: From latta at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jul 11, 2000 Subject: Shutdown stsetch: Pumpdown time exceeded message. Tried re-booting PC several times- no joy. Will not vent loadlock. Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 12, 2000 Subject: Shutdown Clear stsetch: rebooted plant. Message-ID: From caudillo at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: caudillo at snf.stanford.edu (caudillo at snf.stanford.edu) Date: Jul 13, 2000 Subject: Shutdown stsetch: Turbo shutdown again,needs rebooting Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 14, 2000 Subject: Shutdown Clear stsetch: rebooted plant - unloaded wafer. Message-ID: From latta at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jul 17, 2000 Subject: Problem stsetch: Can't open recipe; Error reads- General protection fault in module RE-EXE at 008.0933 Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 18, 2000 Subject: Problem Clear stsetch: restarted windows. Editor seems OK. Message-ID: From latta at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jul 18, 2000 Subject: Problem stsetch: Recipe locked up again.... machine is functional, though Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 19, 2000 Subject: Problem Clear stsetch: rebooted windows again. Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 19, 2000 Subject: Shutdown stsetch: software is not working. Message-ID: From latta at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jul 20, 2000 Subject: Shutdown Clear stsetch: Dennis from STS deleted DEEP recipe which removed error. Recipe re-written. Message-ID: From latta at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jul 20, 2000 Subject: Shutdown stsetch: Load lock will not vent. Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jul 20, 2000 Subject: Shutdown Clear stsetch: rebooth system and vented load lock.. Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 21, 2000 Subject: Shutdown stsetch: need to add oil to pump. Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jul 21, 2000 Subject: Shutdown Clear stsetch: recycled oil into pump. Message-ID: From latta at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jul 31, 2000 Subject: Shutdown stsetch: Generator swich on wrong scale Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jul 31, 2000 Subject: Shutdown Clear stsetch: rebooth system Message-ID: From aaronp at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: aaronp at snf.stanford.edu (aaronp at snf.stanford.edu) Date: Aug 6, 2000 Subject: Shutdown stsetch: ICP interlock failure, turbo spun down, wafer stuck in Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 7, 2000 Subject: Shutdown Clear stsetch: removed wafer & restarted machine. Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 7, 2000 Subject: Shutdown stsetch: short shutdown for maintenance. Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 7, 2000 Subject: Shutdown Clear stsetch: checked oil in turbo pump. Message-ID: From aaronp at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: aaronp at snf.stanford.edu (aaronp at snf.stanford.edu) Date: Aug 13, 2000 Subject: Shutdown stsetch: turbo shut down Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 16, 2000 Subject: Shutdown Clear stsetch: rebuilt forline safety valve. Message-ID: From ukris at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: ukris at snf.stanford.edu (ukris at snf.stanford.edu) Date: Aug 17, 2000 Subject: Shutdown stsetch: Message-ID: Wafer broke in chamber soon after/as it loaded, before processing started. The software stuck in "Waiting for Aux gauge" mode - in "standby" step. From cbaxter at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 17, 2000 Subject: Shutdown Clear stsetch: Message-ID: From ericp at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Aug 18, 2000 Subject: Problem stsetch: turbo quit during run Message-ID: The turbo pump quit in the middle of a run. Could hear it spin down. Error came up on screen (gate open?) Got message that ICP was unavailable, but then it appeared to come back. Tried to unload wafer, but timed out (apparently, load lock was at too high of a pressure. ) Normally I would shut this down on coral, but I left it as a problem in case one of the experienced users knows what to do and can re-start. From flannery at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: flannery at snf.stanford.edu (flannery at snf.stanford.edu) Date: Aug 19, 2000 Subject: Shutdown stsetch: Message-ID: See above - needs to be in shutdown rather than problem From latta at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Aug 21, 2000 Subject: Problem Clear stsetch: restarted software. Message-ID: From latta at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Aug 21, 2000 Subject: Shutdown Clear stsetch: restarted software. Message-ID: From flannery at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: flannery at snf.stanford.edu (flannery at snf.stanford.edu) Date: Aug 23, 2000 Subject: Shutdown stsetch: Turbo Message-ID: The turbo died when the process finished and went into the standby/purge cycle. Wafer is still in chamber - unable to unload. From booth at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 23, 2000 Subject: Shutdown Clear stsetch: rreset loadlock & restarted software, removed wafer. Message-ID: From latta at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Aug 25, 2000 Subject: Shutdown stsetch: Gate open error- turbo winding down. Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 25, 2000 Subject: Shutdown Clear stsetch: cleared error & restarted software. Message-ID: From aaronp at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: aaronp at snf.stanford.edu (aaronp at snf.stanford.edu) Date: Sep 10, 2000 Subject: Shutdown stsetch: will not vent Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 11, 2000 Subject: Shutdown Clear stsetch: was able to vent load lock and unload seq. Message-ID: From latta at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sep 12, 2000 Subject: Shutdown stsetch: Failed- Gate open error. Turbo off. Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 12, 2000 Subject: Shutdown Clear stsetch: cleared wafer on chamber Message-ID: From aaronp at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: aaronp at snf.stanford.edu (aaronp at snf.stanford.edu) Date: Sep 14, 2000 Subject: Shutdown stsetch: turbo down at etch start. my wafer in chamber Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 14, 2000 Subject: Shutdown Clear stsetch: start up turbo pump Message-ID: From flannery at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: flannery at snf.stanford.edu (flannery at snf.stanford.edu) Date: Sep 15, 2000 Subject: Shutdown stsetch: Gate Open Error Message-ID: In the middle of a short seasoning run got a gate open error. Wafer in there is a clean dummy. You can toss it. This is getting damn ridiculous. Either a tech staff member needs to be here 24 hours or you need to train certain night users NOW on how to recover from this error. We cannot tolerate the down time. From booth at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 19, 2000 Subject: Shutdown Clear stsetch: recycled LL pump fomblin, restarted pump, restarted software Message-ID: From yiching at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: yiching at snf.stanford.edu (yiching at snf.stanford.edu) Date: Sep 19, 2000 Subject: Shutdown stsetch: process failed: interlock tripped Message-ID: wafer still inside chamber From booth at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 19, 2000 Subject: Shutdown Clear stsetch: fixed - needed to check for Ion guage error. Message-ID: From caudillo at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: caudillo at snf.stanford.edu (caudillo at snf.stanford.edu) Date: Sep 21, 2000 Subject: Shutdown stsetch: Tripped : failed interlock-tripped Message-ID: From cbaxter at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 21, 2000 Subject: Shutdown Clear stsetch: removed wafer and ramp up turbo Message-ID: From lian at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: lian at snf.stanford.edu (lian at snf.stanford.edu) Date: Sep 24, 2000 Subject: Problem stsetch: Message-ID: "Lock not available" alarm during process. Aborted, but couldn't unload the wafer. From booth at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 25, 2000 Subject: Problem Clear stsetch: restarted software - removed wafer Message-ID: From sjlee at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: sjlee at snf.stanford.edu (sjlee at snf.stanford.edu) Date: Sep 27, 2000 Subject: Problem stsetch: sts turbo down Message-ID: After an apparently routine and successful load, turbo spun down upon a "Process" request. From booth at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 27, 2000 Subject: Problem Clear stsetch: restarted machine & software Message-ID: From flannery at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: flannery at snf.stanford.edu (flannery at snf.stanford.edu) Date: Sep 29, 2000 Subject: Shutdown stsetch: Again Message-ID: Wafer is in machine - please unload. Thanks. From booth at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 29, 2000 Subject: Shutdown Clear stsetch: restarted software & removed wafer Message-ID: From pindermu at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: pindermu at snf.stanford.edu (pindermu at snf.stanford.edu) Date: Oct 6, 2000 Subject: Shutdown stsetch: PC lost communication with system Message-ID: From mcvittie at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Oct 6, 2000 Subject: Shutdown Clear stsetch: Reset PC. jim Message-ID: From sigari at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: sigari at snf.stanford.edu (sigari at snf.stanford.edu) Date: Oct 10, 2000 Subject: Shutdown stsetch: Message-ID: From sigari at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: sigari at snf.stanford.edu (sigari at snf.stanford.edu) Date: Oct 10, 2000 Subject: Shutdown Clear stsetch: Message-ID: From venkat at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: venkat at snf.stanford.edu (venkat at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Shutdown stsetch: pump not working.Date: Nov 17, 2000 5:59:49 AM Message-ID: From booth at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Shutdown stsetch: restarted system.Date: Nov 17, 2000 8:00:08 AM Message-ID: Wafer ready to be removed from LoadLock. Len From bogus@does.not.exist.com Fri Jan 11 13:10:42 2013 From: bogus@does.not.exist.com () Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: No subject Message-ID: MAIL FROM: Received: from zepx (unknown [200.130.218.17]) by computerB.com (Postfix) with ESMTP id 4F13C778DB6 for ; Wed, 15 Oct 2008 10:34:19 -0000 Date: Wed, 15 Oct 2008 18:34:19 +0800 From: "guqcgvtllm" To: "stsetch-pcs" Subject: =?GB2312?B?08q8/si6t6I=?= X-Mailer: Foxmail 5.0 [cn] Mime-Version: 1.0 Content-Type: text/html; charset="GB2312" Content-Transfer-Encoding: base64 Content-Disposition: inline Message-Id: <20081015103419.4F13C778DB6 at computerB.com> PE1FVEEgSFRUUC1FUVVJVj0iQ29udGVudC1UeXBlIiBDT05URU5UPSJ0ZXh0L2h0bWw7Y2hhcnNl dD1nYjIzMTIiPg0KPCFET0NUWVBFIEhUTUwgUFVCTElDICItLy9XM0MvL0RURCBIVE1MIDQuMCBU cmFuc2l0aW9uYWwvL0VOIj4NCjwhLS0gc2F2ZWQgZnJvbSB1cmw9KDAxMzQpZmlsZTovL0M6XERv Y3VtZW50cyUyMGFuZCUyMFNldHRpbmdzXEFkbWluaXN0cmF0b3JcTG9jYWwlMjBTZXR0aW5nc1xU 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2012-08-05 10:45:20: wafer broke in chamber Message-ID: <14915851.11.1344270411616.JavaMail.coral@shine> removed broken wafer and ran o2 clean with no problems From mdickey at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Problem stsetch SNF 2012-08-05 05:17:10: wafer broke Message-ID: <1685884.13.1344270932573.JavaMail.coral@shine> removed wafer From sedwards at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: sedwards at snf.stanford.edu (sedwards at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Problem stsetch SNF 2012-08-13 18:34:49: Wafer broke Message-ID: <31584164.23.1344908090585.JavaMail.coral@shine> i was doing a deep etch without holder and my wafer broke. My apologies to all the users. From sedwards at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: sedwards at snf.stanford.edu (sedwards at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Shutdown stsetch SNF 2012-08-13 18:39:20: wafer broke Message-ID: <28098852.24.1344908361238.JavaMail.coral@shine> wafer broke while doing deep etch without holder From eenriquez at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Shutdown stsetch SNF 2012-08-13 18:39:20: wafer broke Message-ID: <18678335.29.1344960277315.JavaMail.coral@shine> Recovered the user's wafer pieces and cleaned the chamber. Ran O2 plasma. From eenriquez at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Problem stsetch SNF 2012-08-13 18:34:49: Wafer broke Message-ID: <8420628.30.1344960282374.JavaMail.coral@shine> Recovered the user's wafer pieces and cleaned the chamber. Ran O2 plasma. From swlee81 at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: swlee81 at snf.stanford.edu (swlee81 at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Problem stsetch SNF 2012-08-24 15:02:34: Plasma is unstable Message-ID: <9247459.166.1345845754675.JavaMail.coral@shine> I used Smooshal etching of piece of Si sample on dummy Si wafer. Plasma is very unstable and keep blinking. Also, I heard 'bzzz' sound in the electric part. From xzhuan1 at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Problem stsetch SNF 2012-08-24 16:39:50: plasma unstable Message-ID: <24241928.168.1345851591200.JavaMail.coral@shine> observed same thing as the previous user. machine is not usable at the current condition. From jaehlee at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Problem stsetch SNF 2012-08-25 01:30:30: same problem as all the previous user reported Message-ID: <26615244.171.1345883430985.JavaMail.coral@shine> I used the recipe deep for my etch run. test one wafer for 1min and decided not to proceed anymore. From cbaxter at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Comment stsetch SNF 2012-08-26 20:13:40: RF unstable Message-ID: <32409821.3.1346037220846.JavaMail.coral@shine> Tested with O2 clean w/out problem. need further troubleshooting.. From eenriquez at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Shutdown stsetch SNF 2012-08-27 08:14:22: Matching network problem Message-ID: <31089603.11.1346080463489.JavaMail.coral@shine> One of the air capacitor in the matching network is arcing. Need to replace From eenriquez at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Shutdown stsetch SNF 2012-08-27 08:14:22: Matching network problem Message-ID: <2324807.16.1346091318984.JavaMail.coral@shine> Replaced the 350pf air capacitor in the matching network. Ran the Deep recipe and the O2 clean recipe with no problems. From eenriquez at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Comment stsetch SNF 2012-08-26 20:13:40: RF unstable Message-ID: <30034234.17.1346091326992.JavaMail.coral@shine> Replaced the 350pf air capacitor in the matching network. Ran the Deep recipe and the O2 clean recipe with no problems. From eenriquez at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Problem stsetch SNF 2012-08-25 01:30:30: same problem as all the previous user reported Message-ID: <28970868.18.1346091331001.JavaMail.coral@shine> Replaced the 350pf air capacitor in the matching network. Ran the Deep recipe and the O2 clean recipe with no problems. From eenriquez at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Problem stsetch SNF 2012-08-24 16:39:50: plasma unstable Message-ID: <31493955.19.1346091336009.JavaMail.coral@shine> Replaced the 350pf air capacitor in the matching network. Ran the Deep recipe and the O2 clean recipe with no problems. From eenriquez at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Problem stsetch SNF 2012-08-24 15:02:34: Plasma is unstable Message-ID: <27571405.20.1346091340019.JavaMail.coral@shine> Replaced the 350pf air capacitor in the matching network. Ran the Deep recipe and the O2 clean recipe with no problems. From pcristman at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: pcristman at snf.stanford.edu (pcristman at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Problem stsetch SNF 2012-09-25 13:34:26: Platen power out of tolerance Message-ID: <3040449.14.1348605266707.JavaMail.coral@shine> Etch stopped holding the process while platen power was out of tolerance. Tried to unload and restart the process but same error occured. All wafers removed from system and load lock vented. From eenriquez at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Shutdown stsetch SNF 2012-09-25 15:19:45: Lid temperature problem Message-ID: <2335229.17.1348611585909.JavaMail.coral@shine> The temperature reading is jumpy causing the controller to error out. Possibly a bad connection. From cbaxter at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Comment stsetch SNF 2012-09-25 17:35:20: Update Message-ID: <564801.25.1348619721048.JavaMail.coral@shine> Top lid is cold, incoming AC power is present(208vac). Ohmed out heater (open). From eenriquez at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Comment stsetch SNF 2012-09-26 19:12:56: Update Message-ID: <3670197.49.1348711977465.JavaMail.coral@shine> The heater is OK. Replaced a TC connector. Now monitoring temperature. From eenriquez at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Comment stsetch SNF 2012-09-25 17:35:20: Update Message-ID: <32518610.50.1348712414622.JavaMail.coral@shine> Archived From eenriquez at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Shutdown stsetch SNF 2012-09-25 15:19:45: Lid temperature problem Message-ID: <13992600.51.1348712483211.JavaMail.coral@shine> Replaced TC connector. Observed for several hours with no problems. From eenriquez at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Comment stsetch SNF 2012-09-26 19:12:56: Update Message-ID: <27798600.52.1348712498369.JavaMail.coral@shine> Archived From eenriquez at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Comment stsetch SNF 2012-09-26 19:23:31: Update Message-ID: <23568638.53.1348712611439.JavaMail.coral@shine> If the system faults out for platen power, just press Resume. Please report if you see this problem again. From eenriquez at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Problem stsetch SNF 2012-09-25 13:34:26: Platen power out of tolerance Message-ID: <31365756.60.1348758053895.JavaMail.coral@shine> No problems observed. From eenriquez at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Comment stsetch SNF 2012-09-26 19:23:31: Update Message-ID: <13571637.61.1348758061964.JavaMail.coral@shine> Archived From latta at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Comment stsetch SNF 2012-09-27 13:05:17: I think the clamp 'finger pad' maybe missing Message-ID: <17237798.69.1348776317354.JavaMail.coral@shine> The clamp figer is at 11:00 if the wafer is a clock face when loaded into the chamber. I noticed a little dot (finger pad) at the station and the pattern on the wafer is different at that position. From eenriquez at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Comment stsetch SNF 2012-09-27 13:05:17: I think the clamp 'finger pad' maybe missing Message-ID: <13516205.2.1349101469819.JavaMail.coral@shine> Replaced clamp. From latta at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Comment stsetch SNF 2012-10-02 11:40:16: Oct qual Message-ID: <21172264.7.1349203216865.JavaMail.coral@shine> DEEP 00:10:00 Si = 2.06um/min PR = 240A/min SI : PR Sel = 86 : 1 From latta at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Comment stsetch SNF 2012-07-27 15:23:38: Qual 21 July Message-ID: <24266834.8.1349203251203.JavaMail.coral@shine> newer qual posted From jasmine at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: jasmine at snf.stanford.edu (jasmine at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Shutdown stsetch SNF 2012-10-15 14:17:55: wafer broke Message-ID: <2304739.21.1350335875375.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Shutdown stsetch SNF 2012-10-15 14:17:55: wafer broke Message-ID: <15902204.23.1350339098906.JavaMail.coral@shine> Recovered user's wafer. The wafer broke during the etch. Ran O2 plasma. From amoini at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: amoini at snf.stanford.edu (amoini at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Shutdown stsetch SNF 2012-10-31 15:20:10: platen power out of tolerance Message-ID: <30727664.126.1351722011082.JavaMail.coral@shine> dummy wafer stuck in there. stopped mid-run with platen power out of tolerance error. From latta at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Shutdown stsetch SNF 2012-10-31 15:20:10: platen power out of tolerance Message-ID: <33324340.128.1351723131274.JavaMail.coral@shine> able to resume and complete the O2 clean recipe. From popomoo at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Problem stsetch SNF 2012-11-01 23:58:18: platen power out of tolerance Message-ID: <26365582.168.1351839499046.JavaMail.coral@shine> When I ran 'ISO' recipe for 90 minutes, the error message 'platen power out of tolerance' was popped up twice. The first one happened 10min after start, and the latter happened 10min before finish. However, when the message showed up, I resumed the process while I was checking the power. Everything looked normal. Finally, I finished all of my etching time, 90min, after I resumed twice. The etch rate seemed faster than before. From eenriquez at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Problem stsetch SNF 2012-11-01 23:58:18: platen power out of tolerance Message-ID: <16672816.181.1351889449409.JavaMail.coral@shine> Cleaned water flow switch and added coolant to chiller. From minchieh at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: minchieh at snf.stanford.edu (minchieh at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Comment stsetch SNF 2012-11-06 18:34:18: etching rate ~ 3um / min Message-ID: <6154019.36.1352255659311.JavaMail.coral@shine> I am etching 45 um trenches, hoping to go 250 um deep. The etching rate seems to be ~ 3 um / min. From minchieh at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: minchieh at snf.stanford.edu (minchieh at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Comment stsetch SNF 2012-11-06 18:34:52: etching rate ~ 3 um -- with DEEP Message-ID: <18767875.37.1352255693370.JavaMail.coral@shine> From minchieh at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: minchieh at snf.stanford.edu (minchieh at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Problem stsetch SNF 2012-11-07 08:03:11: platen power out of tolerance during O2CLEAN Message-ID: <6303993.4.1352304191616.JavaMail.coral@shine> This happens to me twice these couple days that in the middle of 20 min O2CLEAN the process was held due to platen power out of tolerance. (No problem after the process was resumed.) From eenriquez at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Problem stsetch SNF 2012-11-07 08:03:11: platen power out of tolerance during O2CLEAN Message-ID: <25075962.19.1352339198442.JavaMail.coral@shine> Retightened loose thermocouple connector. From askar at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: askar at snf.stanford.edu (askar at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Shutdown stsetch SNF 2012-11-08 13:37:24: cannot move wafer Message-ID: <31409225.43.1352410645208.JavaMail.coral@shine> thinks it is vented but load lock is under vacuum From eenriquez at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Shutdown stsetch SNF 2012-11-08 13:37:24: cannot move wafer Message-ID: <24731855.45.1352412972956.JavaMail.coral@shine> Software locked up. Reset the computer. From latta at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Comment stsetch SNF 2012-11-09 13:49:05: Nov qual Message-ID: <23415170.21.1352497745507.JavaMail.coral@shine> DEEP 00:10:00 Si = 2.38um/min PR = 233A/min SI : PR Sel = 102 : 1 From latta at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Comment stsetch SNF 2012-10-02 11:40:16: Oct qual Message-ID: <27431200.22.1352497758567.JavaMail.coral@shine> newer qual posted From latta at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Comment stsetch SNF 2012-11-06 18:34:18: etching rate ~ 3um / min Message-ID: <5951251.23.1352497787686.JavaMail.coral@shine> new qual shows slightly higher etch rate From latta at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Comment stsetch SNF 2012-11-06 18:34:52: etching rate ~ 3 um -- with DEEP Message-ID: <10991242.24.1352497794704.JavaMail.coral@shine> new qual shows slightly higher etch rate From tasyurek at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: tasyurek at snf.stanford.edu (tasyurek at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Problem stsetch SNF 2012-12-04 17:12:19: ICP holding process while Coil power out of tolerance Message-ID: <532227.28.1354669940388.JavaMail.coral@shine> From cbaxter at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Problem stsetch SNF 2012-12-04 17:12:19: ICP holding process while Coil power out of tolerance Message-ID: <31970436.32.1354672784322.JavaMail.coral@shine> Ran 10 mins O2 clean and 10 mins Deep recipes, could not duplicate the same fault.. From jackson at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Problem stsetch SNF 2012-12-04 21:16:36: ICP serial communication failure alarm Message-ID: <17634882.36.1354684597839.JavaMail.coral@shine> this alarmed and the process stopped. From eenriquez at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Problem stsetch SNF 2012-12-04 21:16:36: ICP serial communication failure alarm Message-ID: <346148.2.1354724761567.JavaMail.coral@shine> Unable to duplicate problem. From tasyurek at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: tasyurek at snf.stanford.edu (tasyurek at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Shutdown stsetch SNF 2012-12-09 16:24:25: wafer broke inside chamber, could not unload Message-ID: <16715083.3.1355099066101.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Shutdown stsetch SNF 2012-12-09 16:24:25: wafer broke inside chamber, could not unload Message-ID: <1456639.16.1355159727690.JavaMail.coral@shine> Recovered the user's wafer, cleaned the chamber and ran O2 plasma. Cycled wafers with no problems. From tasyurek at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: tasyurek at snf.stanford.edu (tasyurek at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Shutdown stsetch SNF 2012-12-10 15:36:44: wafer broke inside chamber Message-ID: <14252094.17.1355182605340.JavaMail.coral@shine> From cbaxter at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Shutdown stsetch SNF 2012-12-10 15:36:44: wafer broke inside chamber Message-ID: <16961017.22.1355186724127.JavaMail.coral@shine> Vented chamber and removed broken wafer it look like a stress break, wafer broke in 4 pieces. Wiped down chamber with ipa and ran O2 clean. From lee583 at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: lee583 at snf.stanford.edu (lee583 at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Problem stsetch SNF 2012-12-10 21:34:28: Message-ID: <23847250.32.1355204068561.JavaMail.coral@shine> From lee583 at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: lee583 at snf.stanford.edu (lee583 at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Problem stsetch SNF 2012-12-10 21:37:04: Message-ID: <10367248.33.1355204225103.JavaMail.coral@shine> From lee583 at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: lee583 at snf.stanford.edu (lee583 at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Problem stsetch SNF 2012-12-10 21:37:56: Mistake Message-ID: <6121011.34.1355204277601.JavaMail.coral@shine> Sorry, it's my mistake! Please ignore! From eenriquez at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Problem stsetch SNF 2012-12-10 21:34:28: Message-ID: <21063974.44.1355241430489.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Problem stsetch SNF 2012-12-10 21:37:04: Message-ID: <23891928.45.1355241433527.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Problem stsetch SNF 2012-12-10 21:37:56: Mistake Message-ID: <16707409.46.1355241439596.JavaMail.coral@shine> OK From tasyurek at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: tasyurek at snf.stanford.edu (tasyurek at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Shutdown stsetch SNF 2012-12-19 20:30:20: wafer broke inside chamber Message-ID: <7496881.39.1355977820925.JavaMail.coral@shine> dear maintenance staff, please let me know if I can get my wafer back. Sorry this happened From cbaxter at snf.stanford.edu Fri Jan 11 13:10:42 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:10:42 -0000 Subject: Shutdown stsetch SNF 2012-12-19 20:30:20: wafer broke inside chamber Message-ID: <1704781.0.1356023088838.JavaMail.coral@shine> Vacuumed out broken wafer chips..