Shutdown stsetch: Wafer robot problem...failed to pickup during unload

sjlee at snf.stanford.edu sjlee at snf.stanford.edu
Fri Jan 11 13:10:42 PST 2013

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Wafer robot problem...failed to pickup during unload

Previous message: Shutdown stsetch: FAILED Gate open Alarm. Wafer in Chmbr.
Next message: Shutdown Clear stsetch: rebooted plant & control software. OK
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