Shutdown stsetch: stsetch load arm stuck!!!

franklin at snf.stanford.edu franklin at snf.stanford.edu
Fri Jan 11 13:10:42 PST 2013


Load arm is stuck midway in unloading process.  Wafer is still in wafer holder.  Squeaking noise which has been on STS recently during load/unload finally has caused a problem.  STS is still squeaking as it is trying to unload the wafer.
nate franklin




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