Shutdown stsetch: Interlock tripped, turbo pump slowed down

chcheng at snf.stanford.edu chcheng at snf.stanford.edu
Fri Jan 11 13:10:42 PST 2013

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Interlock tripped, turbo pump slowed down, the wafer is still inside the chamber

Previous message: Shutdown Clear stsetch: changed flow meter...
Next message: Shutdown stsetch SNF 2012-08-05 10:45:20: wafer broke in chamber
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