Shutdown stsetch: system shutdown, no power to the turbo controller and system won't communicate..
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Fri Jan 11 13:10:42 PST 2013
Previous message:
Problem stsetch SNF 2012-11-07 08:03:11: platen power out of tolerance during O2CLEAN
Next message:
Shutdown stsetch SNF 2012-11-08 13:37:24: cannot move wafer
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
Previous message:
Problem stsetch SNF 2012-11-07 08:03:11: platen power out of tolerance during O2CLEAN
Next message:
Shutdown stsetch SNF 2012-11-08 13:37:24: cannot move wafer
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
More information about the stsetch-pcs mailing list