Shutdown stsetch: FAILED Gate open Alarm. Wafer in Chmbr.
caudillo at snf.stanford.edu
caudillo at snf.stanford.edu
Fri Jan 11 13:10:42 PST 2013
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Comment stsetch: Gen. Fault occured.Len reset.
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Shutdown stsetch: Wafer robot problem...failed to pickup during unload
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Comment stsetch: Gen. Fault occured.Len reset.
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