Shutdown Clear stsetch: rebooted plant & control software. OK
booth at snf.stanford.edu
booth at snf.stanford.edu
Fri Jan 11 13:10:42 PST 2013
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Shutdown stsetch: Wafer robot problem...failed to pickup during unload
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Shutdown Clear stsetch: Cesar restarted pump, rebooted PC, wafer removed, seasoning performed.
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Shutdown stsetch: Wafer robot problem...failed to pickup during unload
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Shutdown Clear stsetch: Cesar restarted pump, rebooted PC, wafer removed, seasoning performed.
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