Shutdown stsetch: Pumpdown time exceeded message. Tried re-booting PC several times- no joy. Will not vent loadlock.
latta at snf.stanford.edu
latta at snf.stanford.edu
Fri Jan 11 13:10:42 PST 2013
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Shutdown Clear stsetch: rebooted plant.
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Shutdown Clear stsetch: Cesar restarted pump, rebooted PC, wafer removed, seasoning performed.
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Shutdown Clear stsetch: rebooted plant.
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