Shutdown Clear stsetch: rebooted plant - unloaded wafer.
booth at snf.stanford.edu
booth at snf.stanford.edu
Fri Jan 11 13:10:42 PST 2013
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Shutdown stsetch: Turbo shutdown again,needs rebooting
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Problem stsetch: Can't open recipe; Error reads- General protection fault in module RE-EXE at 008.0933
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Shutdown stsetch: Turbo shutdown again,needs rebooting
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Problem stsetch: Can't open recipe; Error reads- General protection fault in module RE-EXE at 008.0933
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