Shutdown stsetch: short shutdown for maintenance.
booth at snf.stanford.edu
booth at snf.stanford.edu
Fri Jan 11 13:10:42 PST 2013
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Shutdown stsetch: ICP interlock failure, turbo spun down, wafer stuck in
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Previous message:
Shutdown stsetch: ICP interlock failure, turbo spun down, wafer stuck in
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Shutdown Clear stsetch: checked oil in turbo pump.
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