Problem stsetch: turbo quit during run

ericp at snf.stanford.edu ericp at snf.stanford.edu
Fri Jan 11 13:10:42 PST 2013


The turbo pump quit in the middle of a run.  Could
hear it spin down.  Error came up on screen (gate 
open?) Got message that ICP was unavailable, but then 
it appeared to come back.  Tried to unload wafer, but
timed out (apparently, load lock was at too high of a 
pressure. )  
Normally I would shut this down on coral, but I left it 
as a problem in case one of the experienced users
knows what to do and can re-start. 




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