Problem stsetch: turbo quit during run
ericp at snf.stanford.edu
ericp at snf.stanford.edu
Fri Jan 11 13:10:42 PST 2013
The turbo pump quit in the middle of a run. Could
hear it spin down. Error came up on screen (gate
open?) Got message that ICP was unavailable, but then
it appeared to come back. Tried to unload wafer, but
timed out (apparently, load lock was at too high of a
pressure. )
Normally I would shut this down on coral, but I left it
as a problem in case one of the experienced users
knows what to do and can re-start.
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