Shutdown stsetch: process failed: interlock tripped

yiching at snf.stanford.edu yiching at snf.stanford.edu
Fri Jan 11 13:10:42 PST 2013

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wafer still inside chamber

Previous message: Shutdown Clear stsetch: recycled LL pump fomblin, restarted pump, restarted software
Next message: Shutdown Clear stsetch: fixed - needed to check for Ion guage error.
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