Shutdown stsetch SNF 2012-08-13 18:39:20: wafer broke

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Jan 11 13:10:42 PST 2013

Previous message: Shutdown stsetch SNF 2012-08-13 18:39:20: wafer broke
Next message: Problem stsetch SNF 2012-08-24 15:02:34: Plasma is unstable
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Recovered the user's wafer pieces and cleaned the chamber.  Ran O2 plasma.

Previous message: Shutdown stsetch SNF 2012-08-13 18:39:20: wafer broke
Next message: Problem stsetch SNF 2012-08-24 15:02:34: Plasma is unstable
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the stsetch-pcs mailing list