Problem stsetch SNF 2012-08-24 15:02:34: Plasma is unstable

swlee81 at snf.stanford.edu swlee81 at snf.stanford.edu
Fri Jan 11 13:10:42 PST 2013


I used Smooshal etching of piece of Si sample on dummy Si wafer. Plasma is very unstable and keep blinking. Also, I heard 'bzzz' sound in the electric part.



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