Shutdown stsetch SNF 2012-08-27 08:14:22: Matching network problem

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Jan 11 13:10:42 PST 2013


Replaced the 350pf air capacitor in the matching network.  Ran the Deep recipe and the O2 clean recipe with no problems.



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