Problem stsetch SNF 2012-09-25 13:34:26: Platen power out of tolerance

pcristman at snf.stanford.edu pcristman at snf.stanford.edu
Fri Jan 11 13:10:42 PST 2013


Etch stopped holding the process while platen power was out of tolerance. Tried to unload and restart the process but same error occured. All wafers removed from system and load lock vented.



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