Comment stsetch SNF 2012-09-27 13:05:17: I think the clamp 'finger pad' maybe missing

latta at snf.stanford.edu latta at snf.stanford.edu
Fri Jan 11 13:10:42 PST 2013


The clamp figer is at 11:00 if the wafer is a clock face when loaded into the chamber.  I noticed a little dot (finger pad) at the station and the pattern on the wafer is different at that position.



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