Shutdown stsetch SNF 2012-10-15 14:17:55: wafer broke

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Jan 11 13:10:42 PST 2013

Previous message: Shutdown stsetch SNF 2012-10-15 14:17:55: wafer broke
Next message: Shutdown stsetch SNF 2012-10-31 15:20:10: platen power out of tolerance
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Recovered user's wafer.  The wafer broke during the etch.  Ran O2 plasma.

Previous message: Shutdown stsetch SNF 2012-10-15 14:17:55: wafer broke
Next message: Shutdown stsetch SNF 2012-10-31 15:20:10: platen power out of tolerance
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the stsetch-pcs mailing list