Comment stsetch SNF 2012-11-06 18:34:18: etching rate ~ 3um / min

minchieh at snf.stanford.edu minchieh at snf.stanford.edu
Fri Jan 11 13:10:42 PST 2013


I am etching 45 um trenches, hoping to go 250 um deep.
The etching rate seems to be ~ 3 um / min. 



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