Problem stsetch SNF 2012-11-07 08:03:11: platen power out of tolerance during O2CLEAN

minchieh at snf.stanford.edu minchieh at snf.stanford.edu
Fri Jan 11 13:10:42 PST 2013


This happens to me twice these couple days that in the middle of 20 min O2CLEAN the process was held due to platen power out of tolerance.
(No problem after the process was resumed.)



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