Comment stsetch SNF 2012-11-09 13:49:05: Nov qual
latta at snf.stanford.edu
latta at snf.stanford.edu
Fri Jan 11 13:10:42 PST 2013
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Shutdown stsetch SNF 2012-11-08 13:37:24: cannot move wafer
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Problem stsetch SNF 2012-12-04 17:12:19: ICP holding process while Coil power out of tolerance
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DEEP 00:10:00 Si = 2.38um/min PR = 233A/min SI : PR Sel = 102 : 1
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Shutdown stsetch SNF 2012-11-08 13:37:24: cannot move wafer
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Problem stsetch SNF 2012-12-04 17:12:19: ICP holding process while Coil power out of tolerance
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