Comment stsetch SNF 2012-11-06 18:34:52: etching rate ~ 3 um -- with DEEP
latta at snf.stanford.edu
latta at snf.stanford.edu
Fri Jan 11 13:10:42 PST 2013
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Comment stsetch SNF 2012-11-06 18:34:52: etching rate ~ 3 um -- with DEEP
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new qual shows slightly higher etch rate
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Comment stsetch SNF 2012-11-06 18:34:52: etching rate ~ 3 um -- with DEEP
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Problem stsetch SNF 2012-11-07 08:03:11: platen power out of tolerance during O2CLEAN
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