Problem stsetch SNF 2012-12-04 21:16:36: ICP serial communication failure alarm
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Fri Jan 11 13:10:42 PST 2013
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Problem stsetch SNF 2012-12-04 21:16:36: ICP serial communication failure alarm
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Shutdown stsetch SNF 2012-12-09 16:24:25: wafer broke inside chamber, could not unload
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Unable to duplicate problem.
Previous message:
Problem stsetch SNF 2012-12-04 21:16:36: ICP serial communication failure alarm
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Shutdown stsetch SNF 2012-12-09 16:24:25: wafer broke inside chamber, could not unload
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