Shutdown stsetch SNF 2012-12-09 16:24:25: wafer broke inside chamber, could not unload

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Jan 11 13:10:42 PST 2013


Recovered the user's wafer, cleaned the chamber and ran O2 plasma.  Cycled wafers with no problems.



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